Ridzel, O.
, Yamane, W.
, Mansaray, I.
and Villarrubia, J.
(2023),
Model Validation for Scanning Electron Microscopy, Proc. SPIE 12496, Metrology, Inspection, and Process Control XXXVII, San Jose, CA, US, [online], https://doi.org/10.1117/12.2661103, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=936398
(Accessed December 12, 2024)