Traditional vibration measurement tools often need direct contact, which can alter or damage sensitive samples - especially tiny or fragile ones like MEMS devices. These contact-based tools can also slow down measurement or limit precision.
The invention is an apparatus and process for measuring a vibration spectra of a sample using pulses of light to make a sample vibrate without touching it. A Laser Doppler Vibrometer (LDV) then measures these vibrations by detecting reflected light. The setup includes a special mirror and filters that separate the measurement laser from the vibration-driving light.