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Abstract
A photonic quantum dew point sensor determines a dew point of an analyte and includes a common substrate; a photonic dew sensor on the common substrate and exposed for direct contact with the analyte; a photonic temperature sensor on the common substrate; an optomechanical temperature sensor on the common substrate; a dew sensor substrate interposed between the photonic dew sensor and the common substrate; a heater on the dew sensor substrate proximate to the photonic dew sensor; a temperature sensor substrate interposed between the common substrate and each of the photonic temperature sensor and the optomechanical temperature sensor; and a sensor cover on the photonic temperature sensor, the optomechanical temperature sensor, and the temperature sensor substrate to cover the photonic temperature sensor and the optomechanical temperature sensor to prevent direct contact between the analyte and each of the photonic temperature sensor and the optomechanical temperature sensor.
patent description
(1) Disclosed is a photonic quantum dew point sensor for determining a dew point of an analyte, the photonic quantum dew point sensor comprising: a common substrate; a photonic dew sensor disposed on the common substrate and exposed for direct contact with the analyte; a photonic temperature sensor disposed on the common substrate; an optomechanical temperature sensor disposed on the common substrate; a dew sensor substrate disposed on the common substrate and interposed between the photonic dew sensor and the common substrate; a heater disposed on the dew sensor substrate proximate to the photonic dew sensor to heat the photonic dew sensor above a dew point of the analyte; a temperature sensor substrate disposed on the common substrate and interposed between the common substrate and each of the photonic temperature sensor and the optomechanical temperature sensor; and a sensor cover disposed on optomechanical the photonic temperature sensor, the optomechanical temperature sensor, and the temperature sensor substrate to cover the photonic temperature sensor and the temperature sensor to prevent direct contact between the analyte and each of the photonic temperature sensor and the optomechanical temperature sensor.
(2) Disclosed is a relative humidity sensor comprising: a photonic quantum dew point sensor; and a secondary temperature sensor in communication with the photonic quantum dew point sensor.