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PUBLICATIONS

MOCVD of SnO2 on Silicon Microhotplate Arrays for Use in Gas Sensing Applications

Published

Author(s)

F. DiMeo, Stephen Semancik, Richard E. Cavicchi, John S. Suehle, P Chaparala, N. H. Tea
Proceedings Title
Proc., Materials Research Society Symposium
Volume
415
Conference Location
Boston, MA, USA
Pub Type
Conferences

Citation

DiMeo, F. , Semancik, S. , Cavicchi, R. , Suehle, J. , Chaparala, P. and Tea, N. (1996), MOCVD of SnO<sub>2</sub> on Silicon Microhotplate Arrays for Use in Gas Sensing Applications, Proc., Materials Research Society Symposium, Boston, MA, USA (Accessed October 6, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 30, 1996, Updated October 12, 2021
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