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PUBLICATIONS

Spectroscopic Ellipsometry Determination of the Properties of the Thin Underlying Strained Si Layer and the Roughness at SiO2/Si Interface

Published

Author(s)

Nhan Van Nguyen, Deane Chandler-Horowitz, Paul M. Amirtharaj, Joseph G. Pellegrino
Citation
Applied Physics Letters
Volume
64
Issue
20
Pub Type
Journals

Citation

Nguyen, N. , Chandler-Horowitz, D. , Amirtharaj, P. and Pellegrino, J. (1994), Spectroscopic Ellipsometry Determination of the Properties of the Thin Underlying Strained Si Layer and the Roughness at SiO<sub>2</sub>/Si Interface, Applied Physics Letters (Accessed October 12, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created May 15, 1994, Updated October 12, 2021
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