All-Dielectric Micromachined Calorimeter for High-Resolution Microwave Power Measurement

Published

February 1, 2000

Author(s)

John M. Moreland, Pavel Kabos, Albrecht Jander

Abstract

We have developed a micromachined bimaterial cantilever with a thin-film ferromagnetic resonance (FMR) sensor to probe rf fields near microwave devices. A patterned permalloy film deposited at the tip of the cantilever serves as the localized FMR probe. Power absorption at the tip, under FMR conditions, results in a proportional bending of the bimaterial cantilever. The deflection of the cantilever is measured with an optical lever. The small dimensions of the probe (20 υm x 20υm x 0.05υm) allows for measurements of rf magnetic fields near microwave devices with 20υm resolution and minimal intrusion. The sensor is constructed of low-stress silicon nitride and low-temperature-deposited silicon oxide. The use of dielectric materials in the cantilever beam minimizes the background signal produced by eddy-current heating of the cantilever. Using this scanning FMR probe we have measured vector-component-resolved microwave field distributions near 500 υ wide stipline resonator driven at 9.15 GHz.

Proceedings Title

Tech. Dig., IEEE MEMS 2002 Conference

Conference Dates

January 21-25, 2002

Conference Location

Las Vegas, NV, USA

Conference Title

The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems

Pub Type

Conferences

Keywords

ferromagnetic resonance, microwave power, scanning probe, scanning probe microscope

Citation

Moreland, J. , Kabos, P. and Jander, A. (2000), All-Dielectric Micromachined Calorimeter for High-Resolution Microwave Power Measurement, Tech. Dig., IEEE MEMS 2002 Conference, Las Vegas, NV, USA (Accessed October 14, 2025)