@conference{763321, author = {John Moreland and Pavel Kabos and Albrecht Jander}, title = {All-Dielectric Micromachined Calorimeter for High-Resolution Microwave Power Measurement}, year = {2000}, month = {2000-02-01 00:02:00}, publisher = {Tech. Dig., IEEE MEMS 2002 Conference, Las Vegas, NV, USA}, language = {en}, }