TY - CONF AU - John Moreland AU - Pavel Kabos AU - Albrecht Jander C2 - Tech. Dig., IEEE MEMS 2002 Conference, Las Vegas, NV, USA DA - 2000-02-01 00:02:00 LA - en PB - Tech. Dig., IEEE MEMS 2002 Conference, Las Vegas, NV, USA PY - 2000 TI - All-Dielectric Micromachined Calorimeter for High-Resolution Microwave Power Measurement ER -