NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Nanoscale Measurements with a Through-Focus Scanning-Optical-Microscope

Published

Author(s)

Ravikiran Attota, Richard M. Silver, Thomas A. Germer

Abstract

We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional optical microscope, by analyzing through-focus scanning-optical-microscope (TSOM) images obtained at different focus positions. In principle, this technique can be used to identify which dimension is changing between two nanosized targets and to determine the dimension using a library-matching method. This methodology has potential utility for a wide range of target geometries and application areas, including, nanometrology, nanomanufacturing, defect analysis, semiconductor process control, and biotechnology.
Citation
Future Fab International
Pub Type
Journals

Download Paper

Local Download

Keywords

Through Focus, Scanning, Optical Microscope, Nanometrology, TSOM, Nanomanufacturing
Advanced communications, Electronics, Semiconductors, Metrology, Dimensional metrology, Nanotechnology, Nanobiotechnology and Nanometrology

Citation

Attota, R. , Silver, R. and Germer, T. (2009), Nanoscale Measurements with a Through-Focus Scanning-Optical-Microscope, Future Fab International, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902707 (Accessed October 12, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created July 15, 2009, Updated February 19, 2017
Was this page helpful?