@article{39756,
  author = {Ravikiran Attota and Richard Silver and Thomas Germer},
  title = {Nanoscale Measurements with a Through-Focus Scanning-Optical-Microscope},
  year = {2009},
  month = {2009-07-15},
  publisher = {Future Fab International},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902707},
  language = {en},
}