Woodward, J.
, Hwang, J.
and Prabhu, V.
(2007),
Hunting the Origins of Line Width Roughness with Chemical Force Microscopy, 2007 Int. Conference, on the Frontiers of Characterization and Metrology for Nanoelectronics , Gaithersburg, MD
(Accessed October 9, 2025)
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Hunting the Origins of Line Width Roughness with Chemical Force Microscopy
Published
Author(s)
, , V A. Prabhu
Proceedings Title
2007 Int. Conference, on the Frontiers of Characterization and Metrology for Nanoelectronics
Conference Dates
March 27-29, 2007
Conference Location
Gaithersburg, MD
Conference Title
Proc. of the 2007 Int. Conference, on the Frontiers of Characterization and Metrology for Nanoelectronics, AIP Conf. Vol. 931
Pub Type
Conferences
Citation
Issues
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Created January 1, 2007, Updated February 17, 2017