@conference{321,
  author = {John Woodward and Jeeseong Hwang and V Prabhu},
  title = {Hunting the Origins of Line Width Roughness with Chemical Force Microscopy},
  year = {2007},
  month = {2007-01-01},
  publisher = {2007 Int. Conference, on the Frontiers of Characterization and Metrology for Nanoelectronics , Gaithersburg, MD},
  language = {en},
}