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PUBLICATIONS

Strain Measurement of 3D Structured Nanodevices by EBSD

Published

Author(s)

William Osborn, Lawrence Henry Friedman, Mark D. Vaudin
Proceedings Title
Microscopy and Microanalysis 2017
Conference Dates
August 6-10, 2017
Conference Location
St Louis, MO, US
Pub Type
Conferences

Download Paper

Local Download
Semiconductors, Nanomechanics and Mechanical properties

Citation

Osborn, W. , Friedman, L. and Vaudin, M. (2017), Strain Measurement of 3D Structured Nanodevices by EBSD, Microscopy and Microanalysis 2017, St Louis, MO, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922940 (Accessed December 1, 2025)

Issues

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Created August 7, 2017, Updated September 29, 2025
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