@conference{1293626, author = {William Osborn and Lawrence Henry Friedman and Mark Vaudin}, title = {Strain Measurement of 3D Structured Nanodevices by EBSD}, year = {2017}, month = {2017-08-07 04:08:00}, publisher = {Microscopy and Microanalysis 2017, St Louis, MO, US}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922940}, language = {en}, }