TY  - CONF
AU  - Osborn, William
AU  - Friedman, Lawrence Henry
AU  - Vaudin, Mark
C2  - Microscopy and Microanalysis 2017, St Louis, MO, US
DA  - 2017-08-07 04:08:00
LA  - en
PB  - Microscopy and Microanalysis 2017, St Louis, MO, US
PY  - 2017
TI  - Strain Measurement of 3D Structured Nanodevices by EBSD
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922940
ER  -