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PUBLICATIONS

An Unconventional Tradespace of Focused-Ion-Beam Machining

Published

Author(s)

Andrew Madison, John S. Villarrubia, Kuo-Tang Liao, Joshua Schumacher, Kerry Siebein, Robert Ilic, James Alexander Liddle, Samuel M. Stavis
Proceedings Title
The 2022 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
Conference Dates
June 20-23, 2022
Conference Location
Monterey, CA, US
Pub Type
Conferences

Download Paper

Local Download

Keywords

focused-ion-beam machining, resolution, throughput, chromia, silica
Process measurement and control, Process improvement, Nanometrology, Nanofabrication / manufacturing, Nanoelectronics, Manufacturing systems design and analysis, Machining and Dimensional metrology

Citation

Madison, A. , Villarrubia, J. , Liao, K. , Schumacher, J. , Siebein, K. , Ilic, R. , Liddle, J. and Stavis, S. (2022), An Unconventional Tradespace of Focused-Ion-Beam Machining, The 2022 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Monterey, CA, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934056 (Accessed October 1, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created June 20, 2022, Updated November 29, 2022
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