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PUBLICATIONS

An Unconventional Tradespace of Focused-Ion-Beam Machining

Published

Author(s)

Andrew Madison, John S. Villarrubia, Kuo-Tang Liao, Joshua Schumacher, Kerry Siebein, Robert Ilic, James Alexander Liddle, Samuel M. Stavis
Proceedings Title
The 2022 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
Conference Dates
June 20-23, 2022
Conference Location
Monterey, CA, US
Pub Type
Conferences

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Keywords

focused-ion-beam machining, resolution, throughput, chromia, silica
Process measurement and control, Process improvement, Nanometrology, Nanofabrication / manufacturing, Nanoelectronics, Manufacturing systems design and analysis, Machining and Dimensional metrology

Citation

Madison, A. , Villarrubia, J. , Liao, K. , Schumacher, J. , Siebein, K. , Ilic, R. , Liddle, J. and Stavis, S. (2022), An Unconventional Tradespace of Focused-Ion-Beam Machining, The 2022 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Monterey, CA, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934056 (Accessed April 30, 2024)

Created June 20, 2022, Updated November 29, 2022