TY  - CONF
AU  - Andrew Madison
AU  - John S. Villarrubia
AU  - Kuo-Tang Liao
AU  - Joshua Schumacher
AU  - Kerry Siebein
AU  - Robert Ilic
AU  - James Alexander Liddle
AU  - Samuel M. Stavis
C2  - The 2022 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Monterey, CA, US
DA  - 2022-06-20 04:06:00
LA  - en
PB  - The 2022 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Monterey, CA, US
PY  - 2022
TI  - An Unconventional Tradespace of Focused-Ion-Beam Machining
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934056
ER  -