@conference{915631,
  author = {Andrew Madison and John S. Villarrubia and Kuo-Tang Liao and Joshua Schumacher and Kerry Siebein and Robert Ilic and James Alexander Liddle and Samuel M. Stavis},
  title = {An Unconventional Tradespace of Focused-Ion-Beam Machining},
  year = {2022},
  month = {2022-06-20 04:06:00},
  publisher = {The 2022 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Monterey, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934056},
  language = {en},
}