Semiconductor Microelectronics and Nanoelectronics Programs

Published

July 1, 2010

Author(s)

Joaquin (. Martinez, Yaw S. Obeng, Michele L. Buckley

Abstract

The microelectronics industry supplies vital components to the electronics industry and to the U.S. economy, enabling repaid improvements in productivity and in new high technology growth industries such as electronic commerce and biotechnology. The National Institute of Standards and Technology (NIST), in fulfilling its mission of strengthening the U.S. economy, works with industry to develop and apply technology, measurements and standards; and applies substantial efforts on behalf of the semiconductor industry and its infrastructure. This report describes the many projects being conducted at NIST that constitute that effort.

Citation

NIST Interagency/Internal Report (NISTIR) - 7686

Report Number

7686

NIST Pub Series

NIST Interagency/Internal Report (NISTIR)

Pub Type

NIST Pubs

Keywords

critical dimension, linewidth, microelectronics, nanoelectronics, semiconductor, wafer

Citation

Martinez, J. , Obeng, Y. and Buckley, M. (2010), Semiconductor Microelectronics and Nanoelectronics Programs, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD (Accessed May 2, 2026)

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