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PUBLICATIONS

Dimensional Measurement of Nanostructures with Scanning Electron Microscopy

Published

Author(s)

Kristine A. Bertness

Abstract

Scanning electron microscopy (SEM) is widely used for the measurement of dimensions of nanostructures. This document describes the calibration of SEM magnification using the ASTM E766-14 practice with NIST Reference Material (RM) 8820 and the calculation of dimensional uncertainty in the use of the calibrated SEM to measure dimensions of a fabricated nanostructure. The dimensional measurements are part of NIST Special Test 15510S.
Citation
Special Publication (NIST SP) - 250-96
Report Number
250-96
NIST Pub Series
Special Publication (NIST SP)
Pub Type
NIST Pubs

Download Paper

DOI Link

Keywords

nanostructures, scanning electron microscopy
Nanometrology and Calibration services

Citation

Bertness, K. (2017), Dimensional Measurement of Nanostructures with Scanning Electron Microscopy, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.250-96 (Accessed October 9, 2025)

Issues

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Created September 20, 2017, Updated November 10, 2018
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