Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Martin Sohn (Fed)

Physicist

Dr. Sohn is a physicist in the Nanoscale Spectroscopy Group at the National Institute of Standards and Technology (NIST). He is leading an effort in the development of Computational Nanostructure Imaging Program for dimensional characterization of semiconductor devices by harnessing deep ultraviolet (DUV) and extreme ultraviolet (EUV) light to obtain 3-dimensional reconstruction and developing advanced quantitative image reconstruction algorithms at the deep-subwavelength scales. The research scope includes nanoscale dimensional measurement sensitivity analysis, phase imaging for nanoscale defect detection, 3-dimensional reconstruction of nanoscale structures, angle scanning illumination, super-resolution imaging, and ptychographic image reconstruction. He is developing Quantum Imaging Program that aims to elucidate various quantum/classical phenomena by imaging quantum states multi-dimensionally using single photons entangled and structured. The research explores quantum phenomena in photon-photon interference and photon-matter interaction, covering nanosecond-gated single photon imaging, single photon interferences, phase analysis at single photon level, biphoton entanglement, orbital angular momentum at high dimensions, quantum harmonic oscillation in trapped particles. Dr. Sohn contributed numerous technical papers, gave talks at international conferences, and holds 3 US patents. Dr. Sohn served 2024 IEEE Conference on Computation Imaging using Synthetic Aperture as the optics track cochair and has been serving the Optical and EUV Nanolithography conference of the SPIE Advanced Lithography and Patterning as a technical committee member.

If you are interested in Dr. Sohn's research areas and seeking a postdoctoral position, martin.sohn [at] nist.gov (please contact Dr. Sohn) to discuss in more detail the opportunities available to join one of the projects, or visit to NRC Research Associate Programs searching the research opportunity titled "EUV Computational Imaging for Nanostructure Characterization."

Publications

Radial polarization imaging of entangled biphoton state

Author(s)
Jiung Kim, Jeeseong Hwang, Martin Sohn
Polarization entanglement of single photons is a key element to enable quantum 2.0 applications such as quantum computing, quantum networks, and quantum sensing...

Lab-based multi-wavelength EUV diffractometry for critical dimension metrology

Author(s)
Bryan Barnes, Aaron Chew, Nicholas Jenkins, Yunzhe Shao, Martin Sohn, Regis Kline, Daniel Sunday, Purnima Balakrishnan, Thomas Germer, Steven Grantham, Clay Klein, Stephanie Moffitt, Eric Shirley, Henry Kapteyn, MARGARET MURNANE
Background: The industry is developing extreme-ultraviolet wavelength (EUV) techniques to measure critical dimensions (CDs) in logic fabrication. As nascent...

Data and Software Publications

Lab-based multi-wavelength EUV diffractometry for critical dimension metrology

Author(s)
Bryan M Barnes, Aaron Chew, Nicholas W Jenkins, Yunzhe Shao, Martin Y Sohn, R Joseph Kline, Daniel F Sunday, Purnima P Balakrishnan, Thomas A Germer, Steven E Grantham, Clay Klein, Stephanie L Moffitt, Eric A Shirley, Henry C Kapteyn, Margaret M Murnane
This data set provides the measurement data from EUV diffractometry, simulated fits to these data, and parametric values and uncertainties from these fits as first reported in Barnes et al., "Lab
Created April 7, 2019, Updated April 10, 2026
Was this page helpful?