Sunday, D.
, List, S.
, Chawla, J.
and Kline, R.
(2016),
Evaluation of Effect of Data Quality on the Profile Uncertainty of Critical Dimension Small Angle X-ray Scattering, Journal of Microlithography Microfabrication and Microsystems
(Accessed April 19, 2024)
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Evaluation of Effect of Data Quality on the Profile Uncertainty of Critical Dimension Small Angle X-ray Scattering
Published
Author(s)
, Scott List, Jasmeet Chawla,
Citation
Journal of Microlithography Microfabrication and Microsystems
Pub Type
Journals
Citation
Created February 17, 2016, Updated February 19, 2017