The ABM contact aligner allows users to align patterns on the front or back of a substrate and to print feature sizes down to 800 nm. The tool offers vacuum, soft, hard and flood exposure methods with frontside overlay accuracy better than 500 nm. It can accommodate substrates ranging from 150 mm diameter wafers down to small pieces.
Exposure methods: flood, soft, hard, and vacuum contact.
Auto-Z Planarization, Wedge Compensation, and Leveling of Chuck