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Focused Ion Beam

The Nova NanoLab 600 (NNL600) is a Focused Ion Beam Scanning Electron Microscope equipped with spectroscopic detectors to allow elemental and phase measurements to be performed at high spatial resolution. The NNL600 operates between 1 keV and 30 keV electron beam energy and 2 kV and 30 kV ion beam accelerating voltage.  The NNL600 has a thermal (Schottky) field emission electron source and a Sidewinder ion column using a Ga+ liquid metal ion source. It can be used for TEM sample preparation; 3D Slice and View imaging, elemental, and phase analysis; nano-fabrication using electron and ion beam deposition; and conventional electron and ion beam imaging. The NNL600 is also equipped with removable STEM detector, cryo stage, nano manipulator, and multiple gas injection systems. 


* up to 30 keV electron beam energy
* up to 30 keV ion beam energy and 21 nA ion beam current
* 5-axis stage
* two silicon drift detectors (80 mm^2 & 30 mm^2)
* high resolution electron backscatter diffraction system
* cryo stage and sample preparation system
* nano-manipulator system for TEM sample prep
* scanning transmission electron microscopy detector
* Everhardt-Thornley detector, through-the-lens detector, CDEM detector

Scientific Opportunities/Applications

* nanofrabrication
* 2D & 3D phase, elemental, and morphological analysis
* TEM and Atom Probe sample preparation
* 2D & 3D cryo analysis of organic and polymeric samples
* nanostructure and nanoparticle imaging and analysis

Usage Information

Access Information

Individual collaborative projects to address NIST measurement needs are possible when the work is consistent with the Surface and Microanalysis Science Division mission space. Contact Babak Nikoobakht and Keana Scott to discuss possible collaborations.

Created March 12, 2009, Updated January 20, 2022