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XUV Characterization Comparison of Mo/Si Multilayer Coating,

Published

Author(s)

D L. Windt, W K. Waskiewicz, G D. Kubiak, T W. Barbee, Jr, R N. Watts
Citation
X-Ray/EUV Optics for Astronomy Microscopy Polarimetry and Projection Lithography

Citation

Windt, D. , Waskiewicz, W. , Kubiak, G. and Barbee, T. (1991), XUV Characterization Comparison of Mo/Si Multilayer Coating,, X-Ray/EUV Optics for Astronomy Microscopy Polarimetry and Projection Lithography (Accessed April 14, 2024)
Created December 31, 1990, Updated October 12, 2021