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XUV Characterization Comparison of Mo/Si Multilayer Coating,
Published
Author(s)
D L. Windt, W K. Waskiewicz, G D. Kubiak, T W. Barbee, Jr, R N. Watts
Citation
X-Ray/EUV Optics for Astronomy Microscopy Polarimetry and Projection Lithography
Pub Type
Journals
Citation
Windt, D.
, Waskiewicz, W.
, Kubiak, G.
and Barbee, T.
(1991),
XUV Characterization Comparison of Mo/Si Multilayer Coating,, X-Ray/EUV Optics for Astronomy Microscopy Polarimetry and Projection Lithography
(Accessed November 7, 2025)