@article{814401,
  author = {D Windt and W Waskiewicz and G Kubiak and T Barbee},
  title = {XUV Characterization Comparison of Mo/Si Multilayer Coating,},
  year = {1991},
  month = {1991-01-01 00:01:00},
  publisher = {X-Ray/EUV Optics for Astronomy Microscopy Polarimetry and Projection Lithography},
  language = {en},
}