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XUV Characterization Comparison of Mo/Si Multilayer Coating,

Published

Author(s)

D L. Windt, W K. Waskiewicz, G D. Kubiak, T W. Barbee, Jr, R N. Watts
Proceedings Title
X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography
Conference Dates
July 9, 1990
Conference Location
San Diego, CA, USA
Conference Title
Proc. of SPIE 1343

Citation

Windt, D. , Waskiewicz, W. , Kubiak, G. and Barbee, T. (1991), XUV Characterization Comparison of Mo/Si Multilayer Coating,, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, San Diego, CA, USA (Accessed May 25, 2024)

Issues

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Created December 31, 1990, Updated October 12, 2021