TY  - CONF
AU  - D Windt
AU  - W Waskiewicz
AU  - G Kubiak
AU  - T Barbee
C2  - X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, San Diego, CA, USA
DA  - 1991-01-01 00:01:00
LA  - en
PB  - X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, San Diego, CA, USA
PY  - 1991
TI  - XUV Characterization Comparison of Mo/Si Multilayer Coating,
ER  -