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X-ray Specular and Diffuse Scatter Characterization of Near Ideal Thin Film Multilayers on Various Substrates Produced by Dual Ion Beam Deposition

Published

Author(s)

J Pedulla, S M. Owens, R Deslattes
Proceedings Title
4th Intl. Conf. on Physics of X-Ray Multilayer Structures
Conference Dates
March 5, 1998
Conference Location
Brekenridge, CO
Conference Title
Proc. 4th Intl. Conf. on Physics of X-Ray Multilayer Structures

Citation

Pedulla, J. , Owens, S. and Deslattes, R. (1998), X-ray Specular and Diffuse Scatter Characterization of Near Ideal Thin Film Multilayers on Various Substrates Produced by Dual Ion Beam Deposition, 4th Intl. Conf. on Physics of X-Ray Multilayer Structures , Brekenridge, CO (Accessed April 26, 2024)
Created January 1, 1998, Updated February 17, 2017