@conference{139756,
  author = {J Pedulla and S Owens and R Deslattes},
  title = {X-ray Specular and Diffuse Scatter Characterization of Near Ideal Thin Film Multilayers on Various Substrates Produced by Dual Ion Beam Deposition},
  year = {1998},
  month = {1998-01-01},
  publisher = {4th Intl. Conf. on Physics of X-Ray Multilayer Structures , Brekenridge, CO},
  language = {en},
}