TY - CONF AU - Pedulla, J AU - Owens, S AU - Deslattes, R C2 - 4th Intl. Conf. on Physics of X-Ray Multilayer Structures , Brekenridge, CO DA - 1998-01-01 LA - en PB - 4th Intl. Conf. on Physics of X-Ray Multilayer Structures , Brekenridge, CO PY - 1998 TI - X-ray Specular and Diffuse Scatter Characterization of Near Ideal Thin Film Multilayers on Various Substrates Produced by Dual Ion Beam Deposition ER -