X-ray Microcalorimeter Arrays Fabricated by Surface Micromachining

Published

March 1, 2004

Author(s)

Gene C. Hilton, James A. Beall, Steven Deiker, Leila R. Vale, W.Bertrand (Randy) Doriese, Joern Beyer, Joel Ullom, Carl D. Reintsema, Yizi Xu, Kent D. Irwin

Abstract

We are developing arrays of Mo/Cu TES-based detectors for use as as x-ray microcalorimeters and sub-mm bolometers. We have fabricated 8 x 8 pixel x-ray microcalorimeter arrays pixel using surface micromachining techniques. This surface-micromachining technique holds the promise of scalability to much larger arrays and may allow for the integration of in-plane multiplexer elements. In this paper we describe the surface micromachining process and recent improvements in the device geometry that provide for increased mechanical strength. We also present x-ray spectra collected using these detectors where an energy resolution of 15 eV was obtained for 5.9 keV x-rays.

Citation

Nuclear Instruments & Methods in Physics Research Section A-Accelerators Spectrometers Detectors and Associated Equipment

Volume

520

Issue

1-3

Pub Type

Journals

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Keywords

x-ray spectroscopy, microcalorimeter, surface micromachining

Citation

Hilton, G. , Beall, J. , Deiker, S. , Vale, L. , Doriese, W. , Beyer, J. , Ullom, J. , Reintsema, C. , Xu, Y. and Irwin, K. (2004), X-ray Microcalorimeter Arrays Fabricated by Surface Micromachining, Nuclear Instruments & Methods in Physics Research Section A-Accelerators Spectrometers Detectors and Associated Equipment, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31414 (Accessed October 16, 2025)