@article{754181, author = {Gene Hilton and James Beall and Steven Deiker and Leila Vale and W.Bertrand Doriese and Joern Beyer and Joel Ullom and Carl Reintsema and Yizi Xu and Kent Irwin}, title = {X-ray Microcalorimeter Arrays Fabricated by Surface Micromachining}, year = {2004}, number = {520}, month = {2004-03-01 00:03:00}, publisher = {Nuclear Instruments & Methods in Physics Research Section A-Accelerators Spectrometers Detectors and Associated Equipment}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31414}, language = {en}, }