TY  - JOUR
AU  - Gene Hilton
AU  - James Beall
AU  - Steven Deiker
AU  - Leila Vale
AU  - W.Bertrand Doriese
AU  - Joern Beyer
AU  - Joel Ullom
AU  - Carl Reintsema
AU  - Yizi Xu
AU  - Kent Irwin
C2  - Nuclear Instruments & Methods in Physics Research Section A-Accelerators Spectrometers Detectors and Associated Equipment
DA  - 2004-03-01 00:03:00
LA  - en
M1  - 520
PB  - Nuclear Instruments & Methods in Physics Research Section A-Accelerators Spectrometers Detectors and Associated Equipment
PY  - 2004
TI  - X-ray Microcalorimeter Arrays Fabricated by Surface Micromachining
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31414
ER  -