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X-Ray Metrology by Diffraction and Reflectivity

Published

Author(s)

D K. Bowen, R Deslattes
Proceedings Title
2000 International Conference on Characterization and Metrology for ULSI Technology at NIST
Conference Dates
June 26-29, 2000
Conference Location
Gaithersburg, MD, USA
Conference Title
Proc. 2000 International Conference on Characterization and Metrology for ULSI Technology at NIST

Citation

Bowen, D. and Deslattes, R. (2001), X-Ray Metrology by Diffraction and Reflectivity, 2000 International Conference on Characterization and Metrology for ULSI Technology at NIST , Gaithersburg, MD, USA (Accessed February 29, 2024)
Created December 31, 2000, Updated October 12, 2021