Bowen, D.
and Deslattes, R.
(2001),
X-Ray Metrology by Diffraction and Reflectivity, 2000 International Conference on Characterization and Metrology for ULSI Technology at NIST , Gaithersburg, MD, USA
(Accessed June 8, 2023)
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X-Ray Metrology by Diffraction and Reflectivity
Published
Author(s)
D K. Bowen,
Proceedings Title
2000 International Conference on Characterization and Metrology for ULSI Technology at NIST
Conference Dates
June 26-29, 2000
Conference Location
Gaithersburg, MD, USA
Conference Title
Proc. 2000 International Conference on Characterization and Metrology for ULSI Technology at NIST
Pub Type
Conferences
Citation
Created December 31, 2000, Updated October 12, 2021