Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

X-Ray Metrology by Diffraction and Reflectivity

Published

Author(s)

D K. Bowen, R Deslattes
Proceedings Title
2000 International Conference on Characterization and Metrology for ULSI Technology at NIST
Conference Dates
June 26-29, 2000
Conference Location
Gaithersburg, MD, USA
Conference Title
Proc. 2000 International Conference on Characterization and Metrology for ULSI Technology at NIST

Citation

Bowen, D. and Deslattes, R. (2001), X-Ray Metrology by Diffraction and Reflectivity, 2000 International Conference on Characterization and Metrology for ULSI Technology at NIST , Gaithersburg, MD, USA (Accessed July 21, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 31, 2000, Updated October 12, 2021