TY  - CONF
AU  - D Bowen
AU  - R Deslattes
C2  - 2000 International Conference on Characterization and Metrology for ULSI Technology at NIST , Gaithersburg, MD, USA
DA  - 2001-01-01 00:01:00
LA  - en
PB  - 2000 International Conference on Characterization and Metrology for ULSI Technology at NIST , Gaithersburg, MD, USA
PY  - 2001
TI  - X-Ray Metrology by Diffraction and Reflectivity
ER  -