@conference{784856,
  author = {D Bowen and R Deslattes},
  title = {X-Ray Metrology by Diffraction and Reflectivity},
  year = {2001},
  month = {2001-01-01 00:01:00},
  publisher = {2000 International Conference on Characterization and Metrology for ULSI Technology at NIST , Gaithersburg, MD, USA},
  language = {en},
}