Lenhart, J.
, Fischer, D.
, Sambasivan, S.
, Lin, E.
, Jones, R.
, Soles, C.
, Wu, W.
, Goldfarb, D.
and Angelopoulos, M.
(2005),
X-ray absorption spectroscopy to probe surface composition and surface deprotection in photoresist films, Langmuir, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854243
(Accessed May 6, 2024)
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X-ray absorption spectroscopy to probe surface composition and surface deprotection in photoresist films
Published
Author(s)
J L. Lenhart, , S Sambasivan, , R L. Jones, , Weida Wu, D L. Goldfarb, M Angelopoulos
Citation
Langmuir
Volume
21
Issue
9
Pub Type
Journals
Download Paper
Citation
Created April 25, 2005, Updated October 12, 2021