@article{783466,
  author = {J Lenhart and Daniel Fischer and S Sambasivan and Eric Lin and R Jones and Christopher Soles and Weida Wu and D Goldfarb and M Angelopoulos},
  title = {X-ray absorption spectroscopy to probe surface composition and surface deprotection in photoresist films},
  year = {2005},
  number = {21},
  month = {2005-04-26 00:04:00},
  publisher = {Langmuir},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854243},
  language = {en},
}