Kopanski, J.
, Albers, J.
, Carver, G.
and Ehrstein, J.
(1990),
Verification of the Relation Between Two-Probe and Four-Probe Resistances as Measured on Silicon Wafers, Journal of the Electrochemical Society
(Accessed December 11, 2023)
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Verification of the Relation Between Two-Probe and Four-Probe Resistances as Measured on Silicon Wafers
Published
Author(s)
, , G. P. Carver,
Citation
Journal of the Electrochemical Society
Volume
137
Issue
12
Pub Type
Journals
Citation
Created November 30, 1990, Updated October 12, 2021