Kopanski, J.
, Albers, J.
, Carver, G.
and Ehrstein, J.
(1990),
Verification of the Relation Between Two-Probe and Four-Probe Resistances as Measured on Silicon Wafers, Journal of the Electrochemical Society
(Accessed May 9, 2025)
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Verification of the Relation Between Two-Probe and Four-Probe Resistances as Measured on Silicon Wafers
Published
Author(s)
, , G. P. Carver,
Citation
Journal of the Electrochemical Society
Volume
137
Issue
12
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created November 30, 1990, Updated October 12, 2021