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Verification of the Relation Between Two-Probe and Four-Probe Resistances as Measured on Silicon Wafers

Published

Author(s)

Joseph Kopanski, John Albers, G. P. Carver, James R. Ehrstein
Citation
Journal of the Electrochemical Society
Volume
137
Issue
12

Citation

Kopanski, J. , Albers, J. , Carver, G. and Ehrstein, J. (1990), Verification of the Relation Between Two-Probe and Four-Probe Resistances as Measured on Silicon Wafers, Journal of the Electrochemical Society (Accessed May 22, 2024)

Issues

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Created November 30, 1990, Updated October 12, 2021