TY  - JOUR
AU  - Joseph Kopanski
AU  - John Albers
AU  - G. Carver
AU  - James Ehrstein
C2  - Journal of the Electrochemical Society
DA  - 1990-12-01 00:12:00
LA  - en
M1  - 137
PB  - Journal of the Electrochemical Society
PY  - 1990
TI  - Verification of the Relation Between Two-Probe and Four-Probe Resistances as Measured on Silicon Wafers
ER  -