@article{845956,
  author = {Joseph Kopanski and John Albers and G. Carver and James Ehrstein},
  title = {Verification of the Relation Between Two-Probe and Four-Probe Resistances as Measured on Silicon Wafers},
  year = {1990},
  number = {137},
  month = {1990-12-01 00:12:00},
  publisher = {Journal of the Electrochemical Society},
  language = {en},
}