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Using Carbon Nanotube Cantilevers in Scanning Probe Metrology

Published

Author(s)

R Schlaf, Y Emirov, J A. Bieber, A Sikder, J Kohlscheen, D A. Walters, M R. Islam, B Metha, Z F. Ren, T L. Shofner, B B. Rossi, Michael W. Cresswell
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE)
Conference Dates
March 3-8, 2002
Conference Location
Santa Clara, CA, USA
Conference Title
SPIE - The International Society for Optical Engineering

Citation

Schlaf, R. , Emirov, Y. , Bieber, J. , Sikder, A. , Kohlscheen, J. , Walters, D. , Islam, M. , Metha, B. , Ren, Z. , Shofner, T. , Rossi, B. and Cresswell, M. (2002), Using Carbon Nanotube Cantilevers in Scanning Probe Metrology, Proc. Intl. Soc. for Optical Engineering (SPIE), Santa Clara, CA, USA (Accessed April 18, 2024)
Created May 31, 2002, Updated October 12, 2021