@conference{764211,
  author = {R Schlaf and Y Emirov and J Bieber and A Sikder and J Kohlscheen and D Walters and M Islam and B Metha and Z Ren and T Shofner and B Rossi and Michael Cresswell},
  title = {Using Carbon Nanotube Cantilevers in Scanning Probe Metrology},
  year = {2002},
  month = {2002-06-01 00:06:00},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE), Santa Clara, CA, USA},
  language = {en},
}