Guillaume, N.
, Kiihamaki, J.
, Karttunen, J.
and Kattelus, H.
(2001),
Use of Electrical Test Structures to Characterize Trench Profiles Etched on SOI Wafers, Proc. IEEE 2001 Int. Conference on Microelectronic Test Structures, Kobe, 1, JA
(Accessed May 5, 2024)
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Use of Electrical Test Structures to Characterize Trench Profiles Etched on SOI Wafers
Published
Author(s)
, J. Kiihamaki, J. Karttunen, H. Kattelus
Proceedings Title
Proc. IEEE 2001 Int. Conference on Microelectronic Test Structures
Conference Dates
March 19-22, 2001
Conference Location
Kobe, 1, JA
Pub Type
Conferences
Citation
Created February 28, 2001, Updated October 12, 2021