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Use of Electrical Test Structures to Characterize Trench Profiles Etched on SOI Wafers

Published

Author(s)

Nadine Guillaume, J. Kiihamaki, J. Karttunen, H. Kattelus
Proceedings Title
Proc. IEEE 2001 Int. Conference on Microelectronic Test Structures
Conference Dates
March 19-22, 2001
Conference Location
Kobe, 1, JA

Citation

Guillaume, N. , Kiihamaki, J. , Karttunen, J. and Kattelus, H. (2001), Use of Electrical Test Structures to Characterize Trench Profiles Etched on SOI Wafers, Proc. IEEE 2001 Int. Conference on Microelectronic Test Structures, Kobe, 1, JA (Accessed March 3, 2024)
Created February 28, 2001, Updated October 12, 2021