TY  - CONF
AU  - Nadine Guillaume
AU  - J. Kiihamaki
AU  - J. Karttunen
AU  - H. Kattelus
C2  - Proc. IEEE 2001 Int. Conference on Microelectronic Test Structures, Kobe, 1, JA
DA  - 2001-03-01 00:03:00
LA  - en
PB  - Proc. IEEE 2001 Int. Conference on Microelectronic Test Structures, Kobe, 1, JA
PY  - 2001
TI  - Use of Electrical Test Structures to Characterize Trench Profiles Etched on SOI Wafers
ER  -