@conference{765291,
  author = {Nadine Guillaume and J. Kiihamaki and J. Karttunen and H. Kattelus},
  title = {Use of Electrical Test Structures to Characterize Trench Profiles Etched on SOI Wafers},
  year = {2001},
  month = {2001-03-01 00:03:00},
  publisher = {Proc. IEEE 2001 Int. Conference on Microelectronic Test Structures, Kobe, 1, JA},
  language = {en},
}