Neubauer, G.
, Erickson, A.
, Williams, C.
, Kopanski, J.
, Rodgers, M.
and Adderton, D.
(1996),
Two-Dimensional Scanning Capacitance Microscopy Measurements of Cross-Sectioned Very Large Scale Integration Test Structures, Journal of Vacuum Science and Technology
(Accessed July 26, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Two-Dimensional Scanning Capacitance Microscopy Measurements of Cross-Sectioned Very Large Scale Integration Test Structures
Published
Author(s)
G. Neubauer, A. Erickson, C. C. Williams, , M. Rodgers, D. Adderton
Citation
Journal of Vacuum Science and Technology
Volume
B 14
Issue
1
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 31, 1996, Updated October 12, 2021