Neubauer, G.
, Erickson, A.
, Williams, C.
, Kopanski, J.
, Rodgers, M.
and Adderton, D.
(1996),
Two-Dimensional Scanning Capacitance Microscopy Measurements of Cross-Sectioned Very Large Scale Integration Test Structures, Journal of Vacuum Science and Technology
(Accessed September 17, 2024)
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Two-Dimensional Scanning Capacitance Microscopy Measurements of Cross-Sectioned Very Large Scale Integration Test Structures
Published
Author(s)
G. Neubauer, A. Erickson, C. C. Williams, , M. Rodgers, D. Adderton
Citation
Journal of Vacuum Science and Technology
Volume
B 14
Issue
1
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 31, 1996, Updated October 12, 2021