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Two-Dimensional Scanning Capacitance Microscopy Measurements of Cross-Sectioned Very Large Scale Integration Test Structures

Published

Author(s)

G. Neubauer, A. Erickson, C. C. Williams, Joseph Kopanski, M. Rodgers, D. Adderton
Citation
Journal of Vacuum Science and Technology
Volume
B 14
Issue
1

Citation

Neubauer, G. , Erickson, A. , Williams, C. , Kopanski, J. , Rodgers, M. and Adderton, D. (1996), Two-Dimensional Scanning Capacitance Microscopy Measurements of Cross-Sectioned Very Large Scale Integration Test Structures, Journal of Vacuum Science and Technology (Accessed March 5, 2024)
Created January 31, 1996, Updated October 12, 2021