TY  - JOUR
AU  - G. Neubauer
AU  - A. Erickson
AU  - C. Williams
AU  - Joseph Kopanski
AU  - M. Rodgers
AU  - D. Adderton
C2  - Journal of Vacuum Science and Technology
DA  - 1996-02-01 00:02:00
LA  - en
M1  - B 14
PB  - Journal of Vacuum Science and Technology
PY  - 1996
TI  - Two-Dimensional Scanning Capacitance Microscopy Measurements of Cross-Sectioned Very Large Scale Integration Test Structures
ER  -