TY  - JOUR
AU  - Neubauer, G.
AU  - Erickson, A.
AU  - Williams, C.
AU  - Kopanski, Joseph
AU  - Rodgers, M.
AU  - Adderton, D.
C2  - Journal of Vacuum Science and Technology
DA  - 1996-02-01 00:02:00
LA  - en
M1  - B 14
PB  - Journal of Vacuum Science and Technology
PY  - 1996
TI  - Two-Dimensional Scanning Capacitance Microscopy Measurements of Cross-Sectioned Very Large Scale Integration Test Structures
ER  -