@article{760231,
  author = {G. Neubauer and A. Erickson and C. Williams and Joseph Kopanski and M. Rodgers and D. Adderton},
  title = {Two-Dimensional Scanning Capacitance Microscopy Measurements of Cross-Sectioned Very Large Scale Integration Test Structures},
  year = {1996},
  number = {B 14},
  month = {1996-02-01 00:02:00},
  publisher = {Journal of Vacuum Science and Technology},
  language = {en},
}